Reactive Molecular Dynamic Simulations of Early Stage of Wet Oxidation of Si (001) Surface
슈퍼관리자
2021-05-21
Reactive Molecular Dynamic Simulations of Early Stage of Wet Oxidation of Si (001) Surface
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Authors :
Mauludi Ariesto Pamungkas, Byung-Hyun Kim, Kwang-Ryeol Lee
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Journal :
J. Appl. Phys.
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Vol :
114
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Page :
073506
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Year :
2013
Abstract
The water repellency was dramatically improved on the F-DLC-coated dual rough surface compared with that on DLC-coated Si or F-DLC-coated Si, which had a water contact angle of 130.6
